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Institute of Radiophysics and Electronics Institute of Radiophysics and Electronics
Division of Physics and Astrophysics

Development of methods of monitoring and control of RF plasma in modern technological processes

N Investment project title Development of methods of monitoring and control of RF plasma in modern technological processes
1. Sector

Electrical engineering, ICT

2. Project description

The low-temperature plasma-assisted processing of materials has a great number of applications in modern technological processes such as manufacturing of semiconductor devices, LCD panels, MEMS etc. and replaces the traditional chemical technique more and more. Due to the reduction of the environmental pollution rate, high efficiency, productivity and resolution the plasma-assisted processing of materials becomes a fundamental technique in modern semiconductor production. This method was first invented and introduced in the seventies and has become a mature technique for semiconductor device manufacturing. Taking into account that plasma is a complex nonlinear system, and the fact that modern control systems have a need for big investments, the research emphasis was put on the development of reliable and efficient methods of monitoring and control of the RF plasma with a relatively low-cost. The aim of this project is to research the contemporary issues of RF plasma monitoring and control, to improve the existing methods, as well as to develop new methods allowing to increase the efficiency and reliability of these systems.

3. Project implementation period 2 years
4. Project location Institute of Radiophysics and Electronics of NAS RA
5. Project overall cost (USD) 62.500
6. Required investments (USD) 500.000
7. Own funds (USD) 22.000
8. Creation of jobs At the beginning of the project At the end of the project
7 20
9. Payback period 3 years
10. Annual profitability index 20 - 30%
11. Detailed costs

-

12. Offer to investor

There is a significant demand and a market, a significant difference between the market price and production costs, easy delivery, significant price to weight ratio.

13. Contact details

Arsen Hakhumyan, Scientific Supervisor of the Institute of Radiophysics and Electronics of NAS RA
E-mail: arsen {[ at ]} irphe.am
Tel.: (+374 91) 450674




Notices








On April 23, 2024, at 10:30, the Annual General Meeting of NAS RA on the main results of the scientific and scientific-organizational activity of the National Academy of Sciences of the Republic of Armenia for 2023 will be held. The Annual General Meetings of the Divisions of Sciences will be held on April 22 at 10:00

The Institute of Physical Research of NAS of Armenia in collaboration with the IPR Armenia Optica Student Chapter have announced a photo contest entitled "Light through the Eyes of a Photographer" dedicated to the International Day of Light. The registration deadline for the competition is May 1

Ս.թ. ապրիլի 10-ին ժ. 15:00-ին ՀՀ ԳԱԱ նիստերի դահլիճում (Բաղրամյան պող., 24) տեղի կունենա սեմինարների շարքի երրորդ հանդիպումը՝ «Հավաքում ենք փաթիլ. ատոմներից դեպի մոլեկուլ և բյուրեղ» խորագրով: Որպես մոդերատոր հանդես կգա անվանի քիմիկոս, SKOLKOVO-ի գիտության և տեխնոլոգիաների ինստիտուտի պրոֆեսոր Արտեմ Օհանովը

On April 5 2024, a seminar on the topic "Advanced channeling Technologies: Strong external Electromagnetic fields to guide charged and Neutral Beams" will be held at the conference hall of the NAS RA Presidum which will be presented by professor of the Institute of Nuclear Physics (Italy) Sultan Dabagov

On April 1st 2024, a seminar on the topic "Magnetometry with nuclear spin-polarized 14N in NV centers in diamond" will be held at the conference hall of the RA NAS Presidium which will be presented by professor of the University of Latvia Marcis Auzinsh

The Shirak Center for Armenological Studies of NAS RA is starting to publish the 1 (27) volume of the "Scientific Works" journal for 2024. Priority is given to articles in English and Russian. The deadline for receiving articles is March 1, 2024

Международный инновационный центр нанотехнологий СНГ (МИЦНТ СНГ) при поддержке Межгосударственного фонда гуманитарного сотрудничества государств - участников СНГ (МФГС) и Объединенного института ядерных исследований объявляет о проведении конкурса на соискание грантов на разработку проектов в рамках деятельности МИЦНТ СНГ в 2024 году и очередной Стажировки молодых ученых и специалистов стран СНГ в Дубне в апреле - мае 2024года

ՀՀ գիտության և տեխնիկայի զարգացման 2020-2024թթ. գերակայության ՀՀ կառավարության որոշման նախագիծ

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